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2.1.6
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2.1.6 Evacuation System
Figure 2.1-6 shows the block diagram of evacuating system.
R.P 1 /
(DRY POMP)
TMP
R.P 2(OPTION) /
(DRY POMP)
NV
V1
V2
V3
V4
GV
V5
V
6
V7
S.E.C (OPTION)
Pi-1
Pi-2
Pi-EX
V8
V9
V10
V
ALVE
状態検知
Fig. 2.1-6 Evacuation System
TMP: Turbo molecular pump for evacuating the specimen chamber
RP: Rotary pump
V1-V7: Vacuum valves
NV: Needle valve
Pi.1: Pirani vacuum gauge
Pi.2: Pirani vacuum gauge