Filter
Top Products
6.4 CD Measurement Function (Option)
6 - 82
(12) Close Button
Closes the Calibration window.
(13) Measured Value indication
Displays the measured result.
When the Multi checkbox is not checked, the latest measurement result is indicated in the
Average box.
When the Multi checkbox is checked, Average, 3 Sigma, Max and Min value is calculated
and indicated by each measurement operation.
6.4.5 Operation
6.4.5.1 Flow of Measuring Operation
Following is the general flow of measuring operation.
• Display of SEM image
• Start of CD measurement function
• Setting of measurement parameters
• Setting of calibration
• Execution of measurement
• Saving of measured results
Details of each operation are described in the following.
6.4.5.2 Display of SEM Image
(1) In the case of the SEM main unit, display a SEM image on the Scanning Image window by
the usual SEM operation. Do this either by setting the Run/Freeze button to Freeze or by
capturing an image with the Capture button.
(2) In the case of the SEM data manager, start up the SEM data manager and specify the
image to be subjected to measurement from the file list or thumbnail.
NOTICE: (1) Use image size of 2560 x 1920 pixels or smaller. Measurement is disabled for
5120 x 3840 pixels images.
(2) In automatic measurement mode, processing time for finding edges depends on
the image size. Larger images need longer processing time.
It is recommended to use 1280 x 960 image size for measurement.
(3) Showing line profiles also needs processing time. For higher throughput, it is
recommended not to show line profiles (uncheck Profile check box).