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3.5 Operation for Image Observation
3 - 48
(3) Manual Focus
Manual focusing can be done using the control knobs on the operation panel or the mouse
in the Scanning Image window.
(a) Knob operation
Use Focus control knobs COARSE and FINE on the manual operation panel.
(b) Mouse operation
Move the mouse cursor to the lower half of the image, where the mouse cursor is
changed to the Focus cursor
. Move the mouse while holding down the left button
for fine focus or the right button for coarse focus. Move to the right for a shorter focal
length and to the left for a longer focal length.
Sensitivity of mouse operation can be adjusted on the Mouse Operation tab in the
Optional setup dialog window.
The Focus Monitor mode is available for monitoring focus.
(4) Auto Stigma and Focus
Select the Auto Stigma and Focus command from Operate menu to start Auto Stigma and
Focus.
It is recommended to use this function at magnifications higher than 5,000×. The results of
Auto Stigma depend on the surface structure of the specimen. When the specimen is
charged up or when there is no surface detail on the specimen, Auto Stigma does not
operate properly.
NOTICE: The accuracy of Auto Focus and Auto Stigma and Focus disimprove if the AFC
Alignment adjustment is not correctly done. In that case, adjust AFC Alignment.
See 3.4.2.2 Axial Alignment Items in Detail.