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3.5 Operation for Image Observation
3 - 90
3.5.7.12 Stopping Stage and Returning to Previous Stage Position
If an incorrect position specification must be canceled when the stage is moving to a coordinate
specification or the stage keeps moving and does not stop for some reason, click the !STOP
button.
Fig. 3.5-63 !STOP Button
To return to a previous position after moving stage using coordinate specifying operation, use
Undo - Stage Drive menu. It is effective for only one previous position.
(The stage cannot be reset to two or more previous positions. The Undo-Stage is valid only on
coordinate specification or stage memory motion.)
IMPORTANT: Do not repeat clicking the button. Clicking the button repeatedly can cause
malfunction and damage the specimen or components inside the specimen
chamber.
3.5.7.13 Movable Range and Limitation by Optional Detectors
(1) Movable range of the specimen stage for various specimen sizes
The movable range is limited when observing large size specimens.
Stage motion is limited to the movable range automatically designated by the computer.
The limit value is calculated using the size information set on the Set Sample Size/Detector
dialog box.
The following operating ranges apply:
• For small size specimen, X and Y limitation is specified so the movable range covers just
the size of the specimen.
• For large size specimen, the movable range is limited to safety area. When optional
detectors are inserted to their operating position, the safety area will be limited to
narrower range.
IMPORTANT: Always measure the height of a specimen using the supplied height gauge. In
the Sample Size/Height input field in the Operation Panel Stage tab, set the
specimen size and height. Incorrect specimen size, height, or detector settings
can damage the objective lens, the BSE detector located on the underside of the
objective lens, or the specimen itself.