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6.2 Faraday Cup Device (Option)
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6.2 Faraday Cup Device (Option)
This device is used for measuring the probe current.
6.2.1 Range of Type II Stage Drive
When the Faraday cup device is used, the range of the drive of Z axis and T axis of the sample
stage (Type II) is limited as follows.
• Z axis: 10 mm-65 mm
• T axis: 0° fixation
6.2.2 Usage Method
(1) Connect an ammeter (µµA meter) to the connector (the ammeter is to be prepared by the
customer).
(2) Use HOME Z10 or HOME Z65 button on the control panel to bring stage to specimen
exchange position. The HOME Z10 button moves the Z-axis to the 10mm mark, and the
HOME Z65 button moves the Z-axis to the 65 mm mark. When the HOME Z10 button is
disabled (grayed out), the axis cannot move to the 10 mm mark.
Fig. 6.2-1 The Specimen Exchange Position Button
(3) Please confirm the sample stage moved to the sample exchange position.
(4) The stopper screw is loosened while gripping the knob, and the Faraday cup device is
inserted in the specimen chamber slowly. At the time, please confirm the hole in Faraday
cup is almost at the center on the screen.
(5) Set the magnification more than 10,000×, and measure the probe current.
(6) After the measurement ends, draw out the Faraday cup device to the limit, and tight the
stopper screw and fix it.