6.3 Specification of S-3400N External Communication (Option)
6 - 14
SetStageHomePosition2 0: Normal
receiving
Excluding 0:
Abnormal
receiving
Home position
move2
(Z=65 mm)
SetVacuumMode 0 : High vacuum
1 : Low vacuum
0 : Normal end
2 : Abnormal end
Vacuum mode
setting
SetVacuum 6 to 270:6 – 270
(Pa)
0 : Normal end
2 : Abnormal end
Vacuum value
setting
SetSemCommand Command string 0: Normal
receiving
Excluding 0:
Abnormal
receiving
Extension
command
setting