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3.2.4
3 - 9
3.2.4 Mounting a Specimen on the Type II Stage (5-axis motor-driven stage)
IMPORTANT: The specimen base comes with the system is round. When loading an
irregularly shaped specimen, select an appropriate specimen stub so that the
entire specimen will fit on the stub. Movable range limits are established by
restricting the operating range for the X and Y-axes to within the diameter of the
specimen stub and by calculating the safe operating range for the Z and Tilt axes.
For example, if a square specimen measuring 50 mm on the edge is affixed onto
a 50mm-diameter specimen base and the specimen is rotated 45°, the size of
the specimen in X and Y directions will be 70 mm, which means that the
specimen cannot be protected safely if its size is set to 50 mm. In such a
situation, either use a 77-mm (3-inch) specimen base or specify a specimen
setting (see 3.5.7.3 Setting Specimen Size and Detectors in Use) of 77 mm
(3 inches) rather than 50 mm (2 inches).
IMPORTANT: The height of a specimen should be measured with great care. Be sure to set
the specimen size and height on the Stage Control menu. If they are not
properly set, when the specimen is tilted or Stage Z is small, the specimen can
touch the objective lens or the backscattered electron detector that is provided
on the underside of the objective lens, potentially causing damage to the
specimen, objective lens, and backscattered electron detector.
3.2.4.1 Setting the Specimen Base
As shown in the figure below, screw the specimen stub to the specimen base stand (S, L), and
securely insert it into the specimen holder.
Orient the specimen holder so that is aligns with the reference face of the specimen holder
receptacle on the stage itself, and slide it on.
Carry out <3.2.4.2 Measuring and Setting the Specimen Height >, before loading the
specimen the stage.
Fig. 3.2-7 Fixing the Specimen Base
S
p
ecimen base stand
(
S
,
L
)
Spec
im
e
n h
o
l
der
Reference face
Specimen holder, top side
Stage unit, specimen holder
receptacle, top side
Specimen stand