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4.7 Caution of Maintenance
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4.7 Caution on Maintenance
On maintenance of the instrument, the following cautions must be observed.
(1) Follow the maintenance procedures described in this manual after a full understanding of it.
(In particular, carefully read "PRECAUTIONS ON HANDLING" at the beginning of the
manual.)
(2) Maintenance work (disassembly-reassembly or repair) of the components other than
described in this manual must not be carried out by the customer.
4.8 Electron Gun Beam Axis Maintenance
Because the maintenance and adjustment of the electron gun and the condenser lenses (C lens)
are important work related to the device performance, only the service engineer is carrying out
the maintenance and the adjustment.
It is recommended to carrying out the maintenance and the adjustment of the electron gun beam
axis by the service engineer, when the equipment becomes the following condition.
• After the filament exchanged, the image disappears completely when the accelerating voltage
is changed with the objective lens movable aperture is "0".
• The glare on the image stands out even if Probe Current is enlarged with the objective lens
movable aperture is "0".
• The most lightened spot exceeded the adjustable range in the Beam Alignment.
4.8.1 Adjusting the Electron Gun Mounting Position (for service engineers)
Subtle mechanical variability in the cartridge filament can sometimes create a misalignment state,
exhibiting the types of symptoms described in Section 4.8 above. When Beam Alignment
operations are performed in such a condition, symptoms such as "out of tuning range" tend to
occur.
To prevent this problem, verification/adjustments should be performed according to the steps
given below:
(1) Start the Alignment window. Press Reset All.
Fig. 4.8-1 Selecting Reset All