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3.5 Operation for Image Observation
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3.5.6 Operation of the Specimen Stage (Type I - Manual Stage)
The S-3400N Type I SEM provides a 5-axis manual stage.
3.5.6.1 Movable Range and Specimen Exchange Position
The following table shows movable range and specimen exchange position.
The specimen exchange position is indicated on the label on the stage.
Table 3.5-3 Movable Range of the Stage and the Specimen Exchange Position
Movable Range Specimen Exchange Position
X 0 ~ 80 mm 30 mm
Y 0 ~ 40 mm 20 mm
R 0~360° (Continuous rotation) 0°
T -20 ~ 90° 0°
Z 5.0 ~ 35 mm 35 mm
3.5.6.2 Restriction on the Motion of the X and Y-axes
(1) Restrictions on specimens measuring 6 inches or less across
There are no restrictions on the motion of the X and Y-axes with regard to specimen
measuring 6 inches (153 mm in diameter) across or less.
However, if an optional signal detector is attached or inserted restrictions on the X and Y-
motions may arise. For details, see the operation manual on the optional detector.
(2) Restrictions on ∅8-inch specimens
∅8-inch (200 mm): 30mm≦X≦45mm
3.5.6.3 Allowable Range of Observation and Motion of the Tilt Axis by Specimen Size
The figure on the following page shows observable ranges in X and Y directions by specimen
size.
For ∅8-inch (200 mm) specimens, the range over which the X axis can be moved is limited to
30mm - 45mm; therefore, a specimen can be observed only in that range.