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6.3.2
6 - 11
6.3.2 Each Command
Table 6.3-1 Property Command
Command Return Contents
IsActive 0 : SEM not execute
1 : Ready
SEM status reading
HVOn 0 : HV-OFF
1 : HV-ON
HV ON/OFF monitoring
Vacc 0 : HV OFF
300-30000 : 0.3-30 kV
Acceleration voltage
monitoring
Mag 5-300000：x5-x300k Magnification. monitoring
WD 400-7000：4.00-70.00 mm W.D. monitoring
ObjLensCoarse ０-16383 Focus course value
monitoring
ObjLensFine 0-4095 Focus fine value monitoring
ProbeCurrent 0-1000 : 0.0-100.0 Probe current monitoring
ChamberType 0 : Standard specimen
chamber
Chamber type reading
StageType 0 : Manual stage
1 : 5 axis motor driven
stage
Stage type reading
VacuumMode 0 : High vacuum
1 : Low vacuum
Vacuum mode reading
Vacuum 6-270 : 6-270Pa Vacuum value monitoring
InstructName “S-3400N” Instrument name reading
Version 0-20 Software version reading
Revision 0-99 Software revision reading