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4.4.7
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4.4.7 When Auto Focus or Auto Stigma does not Work Satisfactorily
When auto focus or auto stigma does not produce sharp images, check the following.
(1) Open the Alignment dialog window and start Aperture Alignment mode. If image is
wobbling, carry out aperture alignment.
(2) Open the Alignment dialog window and start Stigma Alignment mode. If image is
wobbling, carry out stigma alignment.
(3) Check if the observed specimen has a fine surface structure. If it does not, please use
manual focus and manual astigmatism correction.
(4) If an abnormal contrast appears due to a charge-up problem, appropriate results may fail
to be produced.
4.4.8 When S-3400N Control Program does not Start Up
When the progress bar on the login dialog window does not progress to the end, or the login
dialog window disappears before completing start up, check the following.
Confirm that the evacuation system is up. Is either the AIR or EVAC switch on the EVAC Panel
blinking or solidly lit? If both switches are off, or both switches are lit or blinking, it is possible
that the evacuation system is in error.
If the stage is a motor-drive stage, is it running normally? After the stage is powered up,
operate the motor again to move the stage to its home position for initialization. If it appears
that the motor is not running properly, turn off the Stage breaker located in the back of the main
unit and restart the stage. If the S-3400N control program comes up normally even when the
stage cannot be operated, it is possible that the motor drive stage is in error, in which case the
service engineer should be called.