5.3
5 - 3
5.3 Spare Parts
The items shown in Table 5.3-1 must be prepared for long-term operation.
Select a proper quantity in consideration of the application of each part.
Table 5.3-1 Spare Parts
Part No. Part Name Location Q’ty Used
52E-2012
A
ccessor
y
FUSE
(
W
)
se
t
1se
t
433-3702 S
p
ecimen stub 15mm dia -
52E-4020 S
p
ecimen stub 26mm dia -
52E-4021 S
p
ecimen stub 32mm dia -
52E-4022 S
p
ecimen stub 51mm dia -
52E-4023 S
p
ecimen stub 77mm dia -
52E-4024 S
p
ecimen stub 102mm dia -
52E-4025 S
p
ecimen stub 127 mm dia -
52E-4026 S
p
ecimen stub 153 mm dia -
52E-4027 S
p
ecimen stub 200 mm dia -
L456825 O-rin
g
AS568-235 FPM For electron
g
un 1
L456711 O-rin
g
AS568-012 FPM For ob
j
ective lens a
p
erture 1
L456815 O-rin
g
AS568-225 FPM For s
p
ecimen chamber
p
or
t
6
L456810 O-rin
g
AS568-220 FPM For s
p
ecimen chambe
r
1
L456818 O-rin
g
AS568-228 FPM For s
p
ecimen chambe
r
1
L456865 O-ring AS568-275 FPM For specimen stage 1