Filter
Top Products
4.4 Troubleshooting
4 - 26
4.4 Troubleshooting
4.4.1 The Evacuation System does not Run
If the evacuation system fails to run or the evacuation system does not proceed, the following
items should be checked:
(1) Is there an error?
If both the EVAC/AIR switches on the EVAC Panel are blinking and the buzzer is sounding,
it is an indication that an error has occurred. If this happens, check the error message on
the PC operation screen. If an error message is displayed, the corrective action described
in the list of error messages in the Appendix should be taken.
(2) Is the PUMP light on the EVAC Panel either lit or blinking?
In the steady-state operation condition, the pump is running normally if the PUMP light is on.
During system startup, the PUMP light begins to blink after the compressor air pressure
has reached a prescribed level and values are set, and the pace of blinking picks up as the
rpm for the turbo molecular pump increases. When the rpm for the turbo molecular pump
has reached a prescribed level and the pump goes into the normal running condition, the
PUMP light becomes solidly lit.
Normally, the turbo molecular pump reaches a set rpm level and the PUMP light becomes
solidly lit within 10 minutes after the power is turned on. If the PUMP light fails to blink or
the blinking condition lasts more than 10 minutes, and if an error message is displayed on
the PC operation screen, the corrective action described in the list of error messages in the
Appendix should be taken. If an error message does not come up, call the service
engineer.