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6.4.5
6 - 83
6.4.5.3 Start of CD Measurement Function
(1) In the case of the SEM main unit, click the CD Measurement button
on the tool
button area of the Operation panel or select Measurement in the Analysis menu.
To start on the SEM Data Manager, use Measure button
on the tool bar or Analysis -
CD Measurement menu command.
The CD Measurement window will open.
Fig. 6.4-14 CD Measurement Window