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6.4.5
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6.4.5.7 Recording Measured Data
The image can be photographed or saved with measured data as is shown on the screen.
Also the measurement data is saved in text format or in Microsoft Excel format.
(1) Photographing an image with measured data
When operating on S-3400N, click Memory Photo button, or select Memory Photo command in
the File menu.
(2) Saving an image with measured data
When operating on S-3400N, click Save button on the Control panel, or select Direct Save
command in the File menu.
When operating on SEM Data Manager, click the Direct Save button on the tool bar.
Image save dialog window will open. Select or input User name, folder and file name and then,
click Save button.
NOTICE: Measured data is not saved by using Save button on Captured Image window.
(3) Saving measured data
Measured can be saved as text format or csv format. The latter is Microsoft Excel compatible.
Measured data is accumulated by succeeding measurement and saved as a file.
(a) Click Save button on the CD Measurement window.
(b) Select a data format (*.mev for text format, or *.csv for Excel format) and specify folder
and filename on the opening save dialog window.
NOTICE: 1. To open the saved data file, use text application program for text file (mev files) or
Microsoft Excel (csv files).
2. When image data with measured value is necessary, record the image before
saving measured data. The data on the image is cleared when the data is saved.