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6.3.1 About the External Communication of S-3400N .......................................6 - 10
6.3.1.1 Communication Procedure.......................................................6 - 10
6.3.1.2 Function and Limitation ............................................................6 - 10
6.3.2 Each Command .......................................................................................6 - 11
6.3.2.1 Initialize the Communication.....................................................6 - 16
6.3.2.2 Acceleration Voltage ................................................................6 - 17
6.3.2.3 Magnification............................................................................6 - 20
6.3.2.4 Working Distance (WD) ...........................................................6 - 21
6.3.2.5 Focus Value .............................................................................6 - 22
6.3.2.6 Probe Current ..........................................................................6 - 23
6.3.2.7 Auto Functions .........................................................................6 - 24
6.3.2.8 Stage .......................................................................................6 - 26
6.3.2.9 Vacuum Setting........................................................................6 - 32
6.3.2.10 Multi-purpose Command ..........................................................6 - 34
6.3.2.11 Machine Information.................................................................6 - 34
6.3.3 Programming ...........................................................................................6 - 35
6.3.3.1 Example of Program ................................................................6 - 35
6.3.4 External Communication Setting Procedure
(Setting of PC for S-3400N) .....................................................................6 - 36
6.3.4.1 Preparation ..............................................................................6 - 36
6.3.4.2 Component Registration...........................................................6 - 36
6.3.4.3 Security and DCOM Settings....................................................6 - 38
6.3.4.4 Setup of the External Communication Option...........................6 - 55
6.4 CD Measurement Function (Option) ......................................................................6 - 56
6.4.1 Outline .....................................................................................................6 - 56
6.4.1.1 CD Measurement Function.......................................................6 - 56
6.4.1.2 CD Measurement Function Options .........................................6 - 56
6.4.2 Specifications...........................................................................................6 - 57
6.4.2.1 Modes of CD Measurement......................................................6 - 57
6.4.2.2 Display of Measured Result......................................................6 - 57
6.4.2.3 Recording/Saving of Measured Result .....................................6 - 57
6.4.2.4 CD Measurement Accuracy (Reproducibility) ...........................6 - 57
6.4.3 Principle of CD Measurement ..................................................................6 - 58
6.4.3.1 Edge Detection Algorithm in Auto Measurement......................6 - 58
6.4.3.2 Linear Approximation Method...................................................6 - 60
6.4.3.3 Threshold Level Method...........................................................6 - 63
6.4.3.4 Measurement Accuracy and Error Factors...............................6 - 64
6.4.4 Description of Windows Used in Measuring Operation.............................6 - 69
6.4.4.1 Starting CD Measurement Function .........................................6 - 69
6.4.4.2 Images for Measurement .........................................................6 - 69
6.4.4.3 CD Measurement Window .......................................................6 - 70
6.4.4.4 Measurement Condition Window..............................................6 - 73
6.4.4.5 Calibration Window ..................................................................6 - 80
6.4.5 Operation .................................................................................................6 - 82
6.4.5.1 Flow of Measuring Operation ...................................................6 - 82