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6.2.2
6 - 9
NOTICE: If faraday cup insert when the stage is moving to safety position, the following alert
message is displayed on screen with the warning buzzer. Draw out the Faraday cup
immediately and wait to stop the warning buzzer and stage movement. After that,
insert the faraday cup. If the Faraday cup insert to the chamber when the stage is
moving to safety position (warning buzzer is ringing) or Z position (WD) is higher than
9.9 mm or stage is tilted, the sample and stage might be damaged. Normally, when
the Faraday cup insert to the chamber, the Alert massage is displayed without warning
buzzer.
《Alert message》
Fig. 6.2-2 Alert Message
Fig. 6.2-3 Faraday Cup Device
Connector, connect an ammeter
(µµA meter) here.
Knob
Stop screw