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APPENDIX - 7
Code Message Text Explanation and Countermeasure
6004 The selected sample height
cannot be set by present
detector/unit.
6005 The selected detector/unit cannot
be set by present sample height.
6006 The selected sample size cannot
be set by present sample height.
6007 The selected sample height
cannot be set by present sample
size.
6008 The selected sample size cannot
be set by present detector/unit.
6009 The selected detector/unit cannot
be set by present sample size.
Due to a conflict between specimen size, specimen height,
the type of detector/unit used, this operation cannot be
performed. The current settings should be checked and
modified as appropriate.
6701 AFC Error. Check Filament
setting.
This message appears if an error occurs in the Auto
Filament Setting executed in the Auto Beam Setting (ABS).
The current filament settings should be checked and
modified as appropriate.
6702 ABA Error. Set No.1 or open the
movable objective aperture, open
Alignement dialog and adjust
Beam Tilt/Shift manualy.
This message appears if an error occurs in the Auto Beam
A
lignment (ABA) executed in the Auto Beam Setting (ABS).
The objective lens movable aperture should be rechecked.
6703 AFC Error. This message appears if an error occurs in the Auto Focus
(AFC) process executed in the Auto Beam Setting (ABS).
*7012 HV forced OFF due to vacuum
error.
This message appears if the vacuum level in the specimen
chamber or electron gun declines during image
observation and the acceleration voltage is automatically
shut off. If this happens, wait until the vacuum level is
restored, and then turn on the acceleration voltage.
This error is also generated if an attempt is made to
perform specimen chamber AIR operation with HV still
turned on.