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6.4 CD Measurement Function (Option)
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6.4.4.5 Calibration Window
This is used to carry out calibration.
Fig. 6.4-13 Calibration Window
(1) Entry No. Combo Box
Specify a No. for registering the calibration. An asterisk (*) appears at the right of an
already registered No.
(2) Caption box
Enter a caption for identifying the calibration with up to 16 characters.
(3) Calibration Condition Box
Indicates the SEM conditions at calibration.
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