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6.4.2
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6.4.2 Specifications
6.4.2.1 Modes of CD Measurement
(1) Manual Measurement
Distance (X, Y, D, width and pitch) between cursors placed by manual operation is
measured. An angle (T) between two cursor lines placed by manual operation is also
measured.
(2) Automatic Measurement
The edges of specimens within a specified range are automatically detected and the
distance (X, Y, width and pitch) is measured. Either linear approximation method or
threshold level method is selectable for the edge detection.
6.4.2.2 Display of Measured Result
(1) Measured result is superposed on an image in 5 digits (in µm unit).
(2) A maximum of eight distances and/or angles can be displayed in succession.
(3) A line profile can be displayed simultaneously with the measured result.
6.4.2.3 Recording/Saving of Measured Result
(1) The measured result and line profile can be photographed on the displayed image
(function available only with SEM main unit).
(2) The measured result and line profile can be saved in a file with the displayed image.
(3) The measured result can be saved in a file of text format.
6.4.2.4 CD Measurement Accuracy (Reproducibility)
Within ±5% in automatic CD measurement after calibration with the following conditions fixed;
accelerating voltage, scan speed, magnification, Working distance, raster rotation angle,
measurement parameter, etc.
Within ±10% without calibration.