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3.10.1
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3.10 Image Quality
The following are references for getting better image quality.
3.10.1 Accelerating Voltage and Image Quality
There is a multitude of accelerating voltages to choose. Resolution, image quality, charging
and other effects are greatly determined by the selected accelerating voltage. Below is a
guideline for selecting an accelerating voltage with which to image various specimens.
Table 3.10-1 Accelerating Voltage and Image Quality
Acc. volt.
(kV)
1 2 3 5 10 15 20 25 30
Resolution
Low
Secondary electron signal
High
Low
Surface information
Topmost surface
info.
Surface info. (incl.
internal info.)
Influence of contamination
※1
High
Low
Charge-up
※2
Low
High
Non-deposition observation
※2
Easy
Specimen damage
※2
Low
High
Influence of floating
magnetic filed
High
Low
X-ray analysis
X-RAY
※1: Under a low accelerating voltage, information is at the topmost surface. When there is
contamination, that surface is observed, exerting significant impact on the image.
※2: The extent of this factor is subject to change depending on the type of specimen involved
and the type of specimen pretreatment conducted.
High