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3.5 Operation for Image Observation
3 - 62
The figure below illustrates the Stage tab on the Operation Panel:
Fig. 3.5-32 Stage Operation Panel
Disp button
Start stage history function
Tilt scrollbar & coordinate box
Tilt axis coordinate display & spec.
Focus Link checkbox
Z motion focus trail s
p
ec.
Eucentric Tilt checkbox
Tilt motion eucentric operation
spec.
Z/TILT box
Z
,
Til
t
axes dis
p
la
y
& o
p
eration
Eucentric checkbox
S
p
ecif
y
Eucentric rotation o
p
eration
Regist button
Registers stage history
X, Y coordinate box
X
,
Y coordinate dis
p
la
y
& in
p
u
t
Rotation button
R-axis continuous move
Rotation coordinate box
R-axis coordinate display & input
Abs/Rel select button
R-axis absolute/relative coord.
specs.
Go button
Starts motion after
R-coordinate spec.
Z scrollbar & coordinate box
Z-axis coordinate display & spec.
Go button
Starts motion after Z & Tilt coord.
spec.
Continuous move button
Continuous move of Z
SPECIMEN box
Sets s
p
ecimen size, detecto
r
Speed slider
Adj. speed of motion
X/Y/R box
X, Y, R axes display & op.
Navigate button
Starts Image Navigation
Memory button
Starts Sta
g
e Memor
y
function.
X
/
Y
/
R
s
p
ecimen
p
osition dis
p
la
y
Z/Tilt specimen position
display
X, Y motion step count box
X, Y axis step count display &
input
X, Y step move button
Starts X, Y axis step motion
Multi Holder button
Starts X, Y motion on Multi
Holde
r
Analysis button
Moves Z axis to anal
y
sis
p
osition.
Calibration button
Starts tilt center axis deviation
correction