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3.5.7 Operation of the Specimen Stage (Type II - 5-Axis Motorized Stage) ....3 - 57
3.5.7.1 Coordinate Notation ...............................................................3 - 57
3.5.7.2 Movable Range and Specimen Exchange Position ................3 - 58
3.5.7.3 Setting Specimen Size and Detectors in Use .........................3 - 60
3.5.7.4 Operation Methods Used to Move the Specimen Stage.........3 - 61
3.5.7.5 X, Y, R Axis Operation ...........................................................3 - 63
3.5.7.6 Z and Tilt Axis Operation........................................................3 - 66
3.5.7.7 Mouse Operation of Stage on the Scanning Image................3 - 67
3.5.7.8 Position Memory Function......................................................3 - 75
3.5.7.9 Stage History Function...........................................................3 - 77
3.5.7.10 Image Navigation ...................................................................3 - 79
3.5.7.11 Rotation/Tilt Eucentric Function and Calibration.....................3 - 83
3.5.7.12 Stopping Stage and Returning to Previous Stage Position.....3 - 90
3.5.7.13 Movable Range and Limitation by Optional Detectors ............3 - 90
3.6 Saving and Recording Images.............................................................................3 - 95
3.6.1 Saving and Recording Images ...............................................................3 - 95
3.6.2 Preparing Images for Recording ............................................................3 - 96
3.6.3 Image Capture .......................................................................................3 - 97
3.6.4 Saving a Scanning Image (Direct Save).................................................3 - 102
3.6.5 Saving Captured Images........................................................................3 - 105
3.6.6 Taking Photographs (Option) .................................................................3 - 106
3.6.6.1 Setting Photo Condition..........................................................3 - 106
3.6.6.2 Direct Photo Recording ..........................................................3 - 108
3.6.6.3 Memory Photo Recording.......................................................3 - 108
3.6.7 Recording Data Display with Images......................................................3 - 109
3.6.7.1 Image Recording Using Menu Commands or Buttons
on the Control Panel ..............................................................3 - 109
3.6.7.2 Captured Image Recording Using Buttons on the
Captured Image Window........................................................3 - 110
3.6.7.3 Record Captured Images without Embedding Text or
Graphic Data..........................................................................3 - 111
3.7 Using SEM Data Manager ...................................................................................3 - 111
3.8 Shutting Down .....................................................................................................3 - 112
3.8.1 Turning High Voltage Off .......................................................................3 - 112
3.8.2 Setting the Stage at the Specimen Exchange Position...........................3 - 112
3.8.3 Withdrawing the Specimen ....................................................................3 - 113
3.8.4 Closing Windows and Shutting off the Display Power ............................3 - 114
3.8.5 Termination Confirmation Items .............................................................3 - 115
3.9 Other Functions...................................................................................................3 - 116
3.9.1 Screen Mode..........................................................................................3 - 116
3.9.2 Split Screen and Dual Mag Mode...........................................................3 - 119
3.9.3 Signal Selection and Color Mixing..........................................................3 - 120
3.9.4 X-ray Analysis Mode ..............................................................................3 - 123
3.9.5 Signal Processing ..................................................................................3 - 126
3.9.6 Operating Condition Memory .................................................................3 - 128