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1.2 Installation Requirements
1 - 10
1.2.6 Vibrations
Before installing the instrument, measure floor vibration at the site. Image trouble will not occur
if the allowable values in Table 1.2-2 are satisfied under the resolution/photographing conditions.
If the instrument is installed on the first floor of a reinforced-concrete (steel-framed-concrete)
building, the performance of the instrument will not be degraded by external vibration as long as
vibration sources such as heavy-duty machine tools or transportation facilities (e.g. electric car)
are not operated nearby.
Check the vibration conditions at the site before installation (or upon receiving an order) as
required. Make sure that the values shown in the table are satisfied.
External vibration: Image trouble will not occur if the conditions in Table 1.2-2 are satisfied.
Table 1.2-2 Allowable Vibrations
Type I Stage Allowable Value (low-frequency region)
Frequency X, Y-direction Z-direction
2.0 Hz 0.8 µm p-p max. -
3.0 Hz 0.8 µm p-p max. -
5.0 Hz 0.8 µm p-p max. 4.0 µm p-p max.
8.0 Hz 2.0 µm p-p max. 1.5 µm p-p max.
10.0 Hz 3.0 µm p-p max. 2.5 µm p-p max.
Type I Stage Allowable Value (high-frequency region)
Frequency X, Y, Z-direction
10.0 Hz 1.0 cm/s
2
max.
50.0 Hz 2.0 cm/s
2
max.
60.0 Hz 2.0 cm/s
2
max.
Type II Stage Allowable Value (low-frequency region)
Frequency X, Y-direction Z-direction
2.0 Hz 1.0 µm p-p max. -
3.0 Hz 3.0 µm p-p max. -
5.0 Hz 2.0 µm p-p max. 0.6 µm p-p max.
8.0 Hz 1.5 µm p-p max. 1.2 µm p-p max.
10.0 Hz 2.5 µm p-p max. 1.6 µm p-p max.