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4.1.3 Maintenance for the Orifice Unit...............................................................4 - 10
4.1.4 Maintenance for the Condenser Aperture ................................................4 - 15
4.1.5 Cleaning of Aperture Plates .....................................................................4 - 19
4.1.6 Ultrasonic Cleaning with Organic Solvent.................................................4 - 20
4.1.7 Replacement of Scintillator.......................................................................4 - 20
4.2 Maintenance of Rotary Pump ................................................................................4 - 21
4.2.1 Oil Change...............................................................................................4 - 21
4.2.2 Replacement of Oil Mist Trap Element.....................................................4 - 21
4.3 Maintenance of Air Compressor.............................................................................4 - 22
4.3.1 Checkup and Maintenance.......................................................................4 - 22
4.3.2 Troubleshooting of Air Compressor..........................................................4 - 24
4.3.3 Location and Functions of Major Components .........................................4 - 25
4.4 Troubleshooting.....................................................................................................4 - 26
4.4.1 The Evacuation System does not Run .....................................................4 - 26
4.4.2 The Vacuum Level in the Specimen Chamber does not Rise...................4 - 27
4.4.3 The Emission Current Fails to Flow Normally...........................................4 - 27
4.4.4 When Image is not Shown on Screen ......................................................4 - 28
4.4.5 When Image is Very Noisy.......................................................................4 - 29
4.4.6 When You cannot Correct Astigmatism ...................................................4 - 30
4.4.7 When Auto Focus or Auto Stigma does not Work Satisfactorily...............4 - 31
4.4.8 When S-3400N Control Program does not Start Up.................................4 - 31
4.4.9 When PC has Hung Up............................................................................4 - 32
4.4.10 When Error Messages are Shown ...........................................................4 - 32
4.5 What to Do in the Event of a Power Outage or the System must be Shutdown
Completely for a Long Time...................................................................................4 - 33
4.6 What to Do when the Power Failure and the System is to be Started Up ..............4 - 33
4.7 Caution on Maintenance........................................................................................4 - 34
4.8 Electron Gun Beam Axis Maintenance...................................................................4 - 34
4.8.1 Adjusting the Electron Gun Mounting Position (for service engineers) .....4 - 34
5 REPLACEMENT PARTS................................................................................................5 - 1
5.1 Consumables.........................................................................................................5 - 1
5.2 Replacement Parts ................................................................................................5 - 2
5.3 Spare Parts............................................................................................................5 - 3
6 ACCESSORY OPERATION ...........................................................................................6 - 1
6.1 Model S-5080 Auto-Camera (Option) ....................................................................6 - 1
6.1.1 Configuration............................................................................................6 - 1
6.1.2 Specifications...........................................................................................6 - 3
6.1.3 Assembling the Camera...........................................................................6 - 5
6.1.4 Operation.................................................................................................6 - 6
6.2 Faraday Cup Device (Option) ................................................................................6 - 8
6.2.1 Range of Type II Stage Drive...................................................................6 - 8
6.1.2 Usage Method..........................................................................................6 - 8
6.3 Specification of S-3400N External Communication (Option)..................................6 - 10