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2.3.11
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2.3.11 SEM Data Manager Window
SEM Data Manager is an image-filing program with an easy-to-operate database function.
Images are registered to the database automatically when saved.
For details, refer to <3.11 Using SEM Data Manager>.
2.3.12 Alignment Dialog Window
The Alignment dialog window is used for alignment operations.
To open the dialog window, click the Align
button on the Control panel or select the
Alignment command from the Operate menu. When the dialog window is opened with the
Align button, Aperture Alignment starts as the default setting.
Refer to <3.4.2 Axial Alignment>.
Fig. 2.3-46 Alignment Window
• Function select buttons: Starts each alignment function. Off stops functions.
• Reset button: Resets alignment of the selected function.
• Reset All button: Resets alignment of all functions.
• Alignment operation: This area is used for adjustment operation. When the mouse area
pointer is
, you can make adjustment both in X or X direction by
moving the mouse while pressing the left button. When the mouse
pointer is
or , adjustment is restricted in X or Y direction.
• Auto button: The Auto button is enabled with the alignment mode is
ApertureAlign, BeamTilt, BeamShift, StigmaAlignX, and
StigmaAlignY.
If the alignment mode is ApertureAlign, StigmaAlignX, or
StigmaAlignY, this function executes the automatic axial alignment
(AAA); if the alignment mode is BeamTilt or BeamShift, this
function executes the automatic beam alignment (ABA). If the the
automatic axial alignment (AAA) is run, the alignment mode will be
automatically turned off. Also, the automatic axial alignment (AAA)
cannot run in the Dual/Full screen mode.
Function select buttons
Alignment operation area