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3.5 Operation for Image Observation
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NOTICE: • The two alignment points on the navigation image shall be separated left - right or
upper - lower side of the image center. The navigation image is divided into four
areas with cross marker in the alignment operation. Alignment points shall be
selected on two different areas.
• When you have moved R, T or Z-axis of stage or have changed accelerating
voltage, perform alignment again.
(6) Navigation operation
After finishing alignment, the picture can be used in just the same manner as a captured
SEM image.
Clicking a point on the navigation image moves the stage to bring the point to the center of
field of view.
(7) Using both imported and captured images
Valid (with a green Need Refresh window) SEM images and properly aligned imported
images can be switched at any time for navigation purposes.
(8) Deleting a navigation image
Clicking the Delete button deletes the image that is currently displayed as a navigation
image.