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6.3 Specification of S-3400N External Communication (Option)
6 - 12
Table 6.3-2 Method Command
Command Set value Return Contents
SemCommInitialize 0 : Normal end
1 : Abnormal end
Initialize the
communication
SetHVOn 0 : HV-OFF
1 : HV-ON
0: Normal
receiving
Excluding 0:
Abnormal
receiving
HV ON/OFF setting
SetVacc 300-30000：0.3-
30.0 kV
0: Normal
receiving
Excluding 0:
Abnormal
receiving
Acceleration
voltage
setting
SetMag 5-300000：x5-x300k 0 : Normal end
2 : Abnormal end
Magnification.
setting
SetWD 400-7000：4.00-
70.00 mm
0 : Normal end
2 : Abnormal end
W.D. setting
SetObjLens Coarse：０-16383
Fine：0-4095
0 : Normal end
2 : Abnormal end
Focus value setting
SetProbeCurrent 0-1000：0.0-100.0 0 : Normal end
2 : Abnormal end
Probe current
setting
SetABC 0: Normal
receiving
Excluding 0:
Abnormal
receiving
ABCC execute
SetAFC 0: Normal
receiving
Excluding 0:
Abnormal
receiving
AFC execute
GetStagePosition 0: Normal
receiving
Excluding 0:
Abnormal
receiving
5 axis position
monitoring