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3 OPERATION ..................................................................................................................3 - 1
3.1 Starting the System ...............................................................................................3 - 2
3.1.1 Start-up Confirmation Items .....................................................................3 - 2
3.1.2 Startup Operation.....................................................................................3 - 2
3.2 Mounting a Specimen ............................................................................................3 - 4
3.2.1 Precautions Concerning Specimen Preparation.......................................3 - 4
3.2.2 Specimen Preparation according to Material............................................3 - 4
3.2.3 Mounting a Specimen on the Type I Stage (Manual Stage) .....................3 - 5
3.2.3.1 Setting the Specimen Stand.....................................................3 - 5
3.2.3.2 Measuring and Setting the Specimen Height ...........................3 - 5
3.2.3.3 Moving the Stage to the Specimen Exchange Position ............3 - 6
3.2.3.4 Procedure for Loading a Specimen..........................................3 - 7
3.2.4 Mounting a Specimen on the Type II Stage (5-axis motor-driven stage) ..3 - 9
3.2.4.1 Setting the Specimen Base......................................................3 - 9
3.2.4.2 Measuring and Setting the Specimen Height ...........................3 - 10
3.2.4.3 Moving the Stage to the Specimen Exchange Position ............3 - 12
3.2.4.4 Loading the Specimen..............................................................3 - 13
3.3 Applying the Accelerating Voltage .........................................................................3 - 15
3.3.1 Conditions under which Accelerating Voltage can be Applied ..................3 - 15
3.3.2 Setting the Accelerating Voltage and Filament Current............................3 - 15
3.4 Adjusting the Electron Optical System...................................................................3 - 18
3.4.1 Setting Parameters for the Electron Optical System ................................3 - 18
3.4.2 Axial Alignment ........................................................................................3 - 22
3.4.2.1 Items Requiring Axial Alignment...............................................3 - 22
3.4.2.2 Axial Alignment Items in Detail.................................................3 - 23
3.5 Operation for Image Observation...........................................................................3 - 31
3.5.1 Selecting a Detector.................................................................................3 - 31
3.5.1.1 Secondary Electron Detector (SE) ...........................................3 - 32
3.5.1.2 Backscattered Electron Detector (BSE) ...................................3 - 33
3.5.1.3 Other Detectors (optional) ......................................................3 - 37
3.5.2 Selecting Magnification ............................................................................3 - 38
3.5.2.1 Notes on Using the Lowest Magnification and Conducting
Observations at a Low Magnification........................................3 - 39
3.5.3 Selecting Scanning Speed .......................................................................3 - 42
3.5.4 Image Brightness and Contrast Adjustment.............................................3 - 44
3.5.5 Focus and Astigmatism Correction ..........................................................3 - 46
3.5.6 Operation of the Specimen Stage (Type I - Manual Stage)......................3 - 52
3.5.6.1 Movable Range and Specimen Exchange Position ..................3 - 52
3.5.6.2 Restriction on the Motion of the X and Y-axes .........................3 - 52
3.5.6.3 Allowable Range of Observation and Motion of the Tilt Axis
by Specimen Size................................................................... 3 - 52
3.5.6.4 Tilt and Z Axis Limitations ........................................................3 - 54
3.5.6.5 Operating the Z-axis (varying the Working Distance [WD])......3 - 55
3.5.6.6 Checking the Ranges of T-axis Tilting and Z-axis Motion
when Observing a Bulk Specimen............................................3 - 56