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4.1 Maintenance of Electron Optical Column
4 - 16
EVAC Panel Control Panel
Fig. 4.1-33 Evacuation Control Panel
(3) Lift the entire electron gun unit to the left and tilt it.
Fig. 4.1-34 Removing the Electron Gun Unit
CAUTION: When lifting the entire electron gun unit, be sure to use both hands, and move
it until it stops. Releasing it prematurely can cause fingers to be caught,
resulting in injury.
NOTICE: To avoid any fingerprint, which can release gas, on components inside the vacuum
unit, the steps described below should be performed by wearing clean gloves.
(4) Remove the anode which is screwed in.
Fig. 4.1-35 Removing the Anode