4.1.2
4 - 7
(1) On the Setup window, set the numerical value in Filament in the electron optical system
Setup tab to 0.
Fig. 4.1-14 Filament Setup Menu
(2) If the accelerating voltage is ON, click OFF to shut it off.
(3) Press either the AIR switch on the Evacuation Control Panel or the AIR evacuation control
button located on the Observation Screen Control Panel. Wait until the interior of the
column completely attains the AIR state.
EVAC Panel Control Panel
Fig. 4.1-15 EVAC Control Panel
(4) Using a hexagon wrench, loosen the Align screw that secures the advancing mechanism
for the objective lens movable aperture.
Fig. 4.1-16 Removing the Objective Lens Movable Aperture