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6.4 CD Measurement Function (Option)
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6.4.5.4 Setting Measurement Parameters
(1) Selecting Registered Measurement Parameters
(a) Measurement parameters can be saved and then called out later to allow efficient
measurement of a number of samples under predetermined parameters.
(b) To call out registered parameters, select the desired parameters from those displayed
in the Entry No. box.
Note that the cursor box size for automatic measurement is different for different image size
even when using the same parameter set. Refer to notice in < 6.4.4.4 Measurement Condition
Window>.
(2) Editing/Saving Measurement Parameters
To edit and save measurement parameters, click the Condition Edit button to open the
Measurement Condition window.
Fig. 6.4-15 Measurement Condition Window