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4.1 Maintenance of Electron Optical Column
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(5) Pull out the entire assembly for the objective lens movable aperture.
Fig. 4.1-17 Removing the Objective Lens Movable Aperture Assembly
(6) Using a precision screw driver, remove the retaining screw that holds down the objective
lens movable aperture plate.
B95010
4
Fig. 4.1-18 Removing the Retaining Screw
(7) Using a pair of tweezers, remove the aperture plate and replace it with a new one (or one
that has been baked in vacuum deposition equipment). If the aperture holder or aperture
base is dirty, polish it with a cotton swab soaked in polishing paste, and then sonicate it
with acetone.
Fig. 4.1-19 Replacing the Aperture Plate
Retaining screw
Positioning slot
Aperture plate
50E-1138(standard)
Aperture holder
432-3039
Aperture base
538-0549