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3.4 Adjusting the Electron Optical System
3 - 30
(6) AFC Alignment adjustments
The AFC Alignment function is designed to the electron beam will pass through the center
of the objective lens. This function is also necessary for the accurate operation of Auto
Focus and the Auto Stigma and Focus.
Fig. 3.4-12 Selecting the AFC Alignment
• Set the magnification between 1,000x to 5,000x. Move a salient spot on the specimen to
near the center of the image.
• Perform focus and stigmation alignments.
• On the Alignment window, click the AFC Align button so that the image will move
periodically.
• Either adjust the STIGMA/ALIGNMENT knob on the Manual Operation knobset or move
the mouse while holding down on the left button of the mouse in the Alignment Operation
area on the Alignment window to minimize the motion of the image.
• After the alignment process is finished, click the Off button.