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APPENDIX - 5
Code Message Text Explanation and Countermeasure
4503 Please input caption. Input Caption before applying calibration or measurement
parameters.
4504 Invalid caption. The caption possibly includes characters not allowed (/ : ; ,
* ? “ < > |).
4505 Caption is too long. Use Caption shorter than 16 characters.
4510 Over maximum number of
measurement.
Number of measurements on an image is limited.
Save results, erase measured data and then repeat
measurement.
4511 Calibration of another direction
not completed.
In manual measurement mode, both X and Y direction
calibration shall be done as a set.
4512 Remove the check mark of
"Multiple".
Calibration operation is not allowed in multiple
measurement mode.
*4520 An information as SEM-image is
missing.
You can not measure of this
image.
The image under measurement lacks image information
(magnification, etc). This error will occur for images
registered using Add from File command if the image
information files have not been copied in the same folder as
the images.
*5000 X-axis parameter error (Max)
Please check sample size with
Stage Control Window.
*5001 X-axis parameter error (Min)
Please check sample size with
Stage Control Window.
*5002 Y-axis parameter error (Max)
Please check sample size with
Stage Control Window.
*5003 Y-axis parameter error (Min)
Please check sample size with
Stage Control Window.
X or Y axis position is at the limit. You can drive the stage
towards reverse direction.
*5004
Z-axis parameter error(Max)
*5005
Z-axis parameter error(Min)
*5006
T-axis parameter error(Max)
*5007
T-axis parameter error(Min)
*5008
R-axis parameter error(Max)
*5009
R-axis parameter error(Min)
These errors will not happen by usual operation.
Turn the STAGE POWER switch to off and turn it on
again.
It these errors occur again, contact a service engineer.
*5020 Cannot execute while drive
X-axis
*5021 Cannot execute while drive
Y-axis
*5022 Cannot execute while drive
Z-axis
*5023 Cannot execute while drive
T-axis
*5024 Cannot execute while drive
R-axis
Possibly the initialization is in progress. Wait for a few
minutes. If the message is shown even when about
10 minutes has passed, shut the stage power off once and
then, turn it on.
*5025 Cannot execute while drive stage
by track ball or joy stick
This message will be shown when operation on the GUI
and by the trackball or joystick is generated simultaneously.