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3.5 Operation for Image Observation
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NOTICE: For this auxiliary operation, a flat specimen should be used and the specimen height
should be measured as accurately as possible using the height gauge. This series of
operations will automatically move the R, Z, and T-axes of the stage.
(3) Stage tilt calibration - Calibration necessary for each specimen exchange
When specimen height differs from the standard value and the specimen is tilted, the
rotation and tilt center axes will shift. For accurate operation of the eucentric function, the
specimen height must be measured and corrected at each specimen exchange.
Since the previous correction factor is retained, calibration is not necessary if the specimen
height does not vary at each specimen exchange.
Carry out the calibration as follows.
(a) Insert a specimen. On the Z/Tilt box, verify that the movable range of the Tilt axis is 20°
or greater.
Then search for a structure of interest near the specimen center.
(b) Click the Calibration button in the Z/Tilt area on Z/Tilt block, then the Stage Tilt
Calibration dialog box will appear.
Fig. 3.5-55 Center of Tilt Calibration Box