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1 SPECIFICATIONS AND INSTALLATION REQUIREMENTS .........................................1 - 1
1.1 Specifications ........................................................................................................1 - 1
1.1.1 Resolution................................................................................................1 - 1
1.1.2 Magnification............................................................................................1 - 1
1.1.3 Electron Optical System...........................................................................1 - 1
1.1.4 Specimen Goniometer Stage ...................................................................1 - 2
1.1.5 Evacuation System ..................................................................................1 - 2
1.1.6 Imaging Function .....................................................................................1 - 2
1.1.7 Safety Equipment.....................................................................................1 - 4
1.1.8 Size and Weight.......................................................................................1 - 4
1.2 Installation Requirements ......................................................................................1 - 5
1.2.1 General....................................................................................................1 - 5
1.2.2 Room Temperature, Humidity and Altitude...............................................1 - 5
1.2.3 Line Power Requirement..........................................................................1 - 5
1.2.4 Grounding Terminal .................................................................................1 - 6
1.2.5 Stray Magnetic Field ................................................................................1 - 7
1.2.6 Vibrations.................................................................................................1 - 10
1.2.7 Power Line Noise and Electric Field Noise...............................................1 - 11
1.2.8 Disturbance by Sound Waves..................................................................1 - 13
1.2.9 Electro-Magnetic Compatibilitiy ................................................................1 - 13
1.2.10 Site Requirements ...................................................................................1 - 13
1.3 Customer-supplied Items.......................................................................................1 - 15
2 FUNCTIONS...................................................................................................................2 - 1
2.1 Control Knobs and Switches on Main Unit .............................................................2 - 2
2.1.1 Main Unit..................................................................................................2 - 2
2.1.2 Electron Optical Column ..........................................................................2 - 3
2.1.3 Specimen Stage (Type I) .........................................................................2 - 4
2.1.4 Specimen Stage (Type II) ........................................................................2 - 5
2.1.5 EVAC Panel .............................................................................................2 - 6
2.1.6 Evacuation System ..................................................................................2 - 7
2.1.7 System Power Distribution Board.............................................................2 - 8
2.2 Control Knobs and Switches on Display Unit .........................................................2 - 9
2.2.1 Display Console .......................................................................................2 - 9
2.2.2 PC (Personal Computer)..........................................................................2 - 10
2.2.3 Manual Operation Panel...........................................................................2 - 11
2.2.4 Mouse and Trackball................................................................................2 - 12
2.3 Graphical User Interface (GUI) ..............................................................................2 - 13
2.3.1 Starting the PC and Logging in the S-3400 Program ...............................2 - 13
2.3.2 S-3400N SEM Main Window....................................................................2 - 15
2.3.3 Control Arrangement on the Window .......................................................2 - 17
2.3.4 Menus ......................................................................................................2 - 18
2.3.5 Popup Menu.............................................................................................2 - 24
2.3.6 Control Panel ...........................................................................................2 - 26
2.3.6.1 Functional Windows on the Control Panel................................2 - 26