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6.4.5
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(h) Click the Set button to display the measurement cursor for calibration according to the
measurement parameters. For calibration in Manual mode, align the measurement
cursors (both X and Y directions) with a position of known dimensions on the screen.
For calibration in Auto mode, make sure the cursor box encloses the edges of the
measurement pattern.
(i) Click the Measure button. The measured result prior to calibration appears in the
Measured Value box.
(j) Enter a calibration value into the Correct Value box.
(k) Click the Calibrate X/Y button. The calculated calibration factor appears in the
Calibration Factor box.
(l) Click the Apply button and the data is saved.
(m) Click the Close button and the Calibration window closes.
(n) Using multi point calibration
In cases where calibration sample has fraction of dimension, it is desirable to use
average value by measuring multiple points.
Check the Multi checkbox, and repeat measurement at points having theoretically
same dimension.
By each measurement, measured value is averaged with previous measure data and
indicated in Average, 3 sigma, Max and Min boxes. Use Cancel to delete the latest
data. To delete all data, use Reset.
When the Reject Max Min box has been checked, the maximum and minimum value
within measured data are rejected for averaging calculation. It is effective when
number of measurement is 5 times or more.
Use the same steps of above (j) to (m) after measurement is finished.
New image acquisition and continued measurement during multi point calibration is
possible.
When once scanning is set to RUN state during multi point calibration operation,
following image condition will be compared with previous measured image when next
measurement is started.
If observation condition of old and new images do not match, a warning message will
be shown.
You can continue measurement including data of old image, or start measurement
newly clearing old data. Checked condition is
[must be equal] : Accelerating voltage / Magnification / Probe current
/ Vacuum / scanning speed / detector
[must be nearly equal] : Working distance (within + - 5%)