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6.4 CD Measurement Function (Option)
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Fig. 6.4-23 Successive Manual Measurement Results
(3) Auto Measurement
(a) With the measurement type at Standard, measurement mode at Auto and measuring
direction at X or Y, click the Set button on CD Measurement window, and the auto
measurement cursors will appear as shown in the figure. The measurement cursor
box will be of the size set previously in the measurement parameters.
(b) Drag the box with the mouse so that the edge part to be measured is enclosed in the
box.
Fig. 6.4-24 Auto Measurement Cursors