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6.4 CD Measurement Function (Option)
6 - 72
(8) Set Button
Displays the measurement cursor. The shape of measurement cursor varies with the type
of measurement and measurement mode.
(9) Measure Button
Executes the CD measurement.
(10) Cursor Color Indication
Specify a color for the measurement cursor. Color changes in the order of white, red,
green, yellow, blue, violet and light blue at each click of the button.
(11) Done/Uncalib Indication
When the present operating condition of SEM matches the selected calibration condition,
Done is indicated together with a calibration No. If the conditions do not match, Uncalib
will be indicated.
(12) Measured Data Box
Displays the SEM conditions at measurement and the measured results.
(13) Comment Box
Enter a comment here. The entered comment is displayed and saved together with the
measured result.
(14) Cancel Button
Deletes the measured result display. In the case of successive measurements, the final
result will be deleted.
(15) Save Button
Saves the measured result in a text file. Clicking the button displays the File Save window.
(16) Calibration Combo Box
Selects a calibration condition. When Auto Select is selected, a calibration condition
which matches the present operating condition will be selected automatically.
(17) Edit Button
Opens the Calibration window for registering a calibration.
(18) Close Button
Terminates the measurement. The File Save window won't appear unless measured
results are saved.
(19) Zoom Check Box
When it is checked, a magnified image is shown in an independent window. It is useful for
fitting cursor to measured edge in manual measurement mode.