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1.1 Specifications
1 - 2
1.1.4 Specimen Goniometer Stage
(a) Type I (80 x 40 stage)
Range of motion: X-axis: 0 to 80 mm
Y-axis: 0 to 40 mm
Z-axis (WD): 5 to 35 mm
R-axis (rotation): 360°, continuous
T-axis (tilt): -20° to 90°
Drive method: Manual drive
Specimen size observable over entire region: 106 mm diameter (also R)
Maximum specimen size: 200 mm diameter
(b) Type II (100 x 50 stage)
Range of motion: X-axis: 0 to 100 mm
Y-axis: 0 to 50 mm
Z-axis (WD): 5 to 65 mm
R-axis (rotation): 360°, continuous
T-axis (tilt): -20°to 90°
Drive method: 5-axis motor drive
With eucentric rotation feature
With image navigation feature
Specimen size observable over entire region: 130 mm diameter (also R)
Maximum specimen size: 200 mm diameter
1.1.5 Evacuation System
Evacuation control: Fully automatic pneumatic valve method
Vacuum gauge: Pirani gauge
Attainable vacuum level: 1.5 x 10
-3
Pa
Range of vacuum level settings: 6 to 270 Pa (22 stops)
Vacuum pump: Turbo molecular pump (TMP) 210 L/s for high vacuum 1 ea.
Rotary pump 135 L/min (50Hz), 162 L/min (60Hz)
TMP back evacuation/low-vacuum settings 1 ea.
Compressor: 0.2 kW output, 1 ea.
1.1.6 Imaging Function
Display monitor: Still image display on the PC monitor (at full scanning speed)
Observation monitor: 18.1- or 19-inch LCD (number of desktop pixels: 1280 x 1024)
Image display mode: Full-screen display (1280 x 960 pixels)
Small-screen display (640 x 480 pixels)
Dual-screen display (640 x 480 pixels, two panes), with
signal-mixing feature