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3.5.7
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3.5.7.5 X, Y, R Axis Operation
(1) Manual operation using trackball
Stage moves in the direction of trackball rotation.
Fig. 3.5-33 Trackball
• Amount of stage motion by ball rotation is linked with magnification. To move a long
distance, it is advisable to lower the magnification.
• The amount of stage motion with respect to the amount of ball rotation can also be veried
in four steps by setting Operation Panel - Stage tab - Speed slider.
• Pushing the direction switch to the [X] side moves the stage only in the lateral direction;
pushing it to the [Y] side moves the stage only in the vertical direction.
• Stage moving direction versus ball rotation direction can be reversed. Check the
Trackball/Joystick check box in the Reverse mode area of the Stage tab in the
Optional setup dialog window.
For a description of custom settings of the stage, see 3.9.14 Optional Setting.
(2) Entering Absolute or Relative Coordinate Value
For X and Y-axes, enter absolute coordinates for X and Y-axes into XY Display/Input box
and then the ENTER key.
For R axis, both absolute and relative value can be used. Select Abs (absolute) or Rel
(relative) with Abs/Rel select buttons, and enter coordinate value into R Display/Input box
and then click Go button. Range of R coordinate is 0 to 360 for absolute and -180 to +180
for relative value.
When the Rotation eucentric check box is checked, X and Y axes move so that the
present field of view is maintained after the stage is rotated. (Eucentric rotation function).
(3) Continuous rotation (R axis)
The R axis is moved with the Rotation buttons. Press
or button to move the
R axis continuously or click the buttons to move in steps.
A driving speed can be selected in four steps using the Speed slider.
Direction switch
Ball