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2.3 Graphical User Interface (GUI)
2 - 62
• Default button: The Default button is enabled when the alignment mode is either
StigmaAlignX or StigmaAlignY. If the alignment mode is
StigmaAlignX, sets the stigma X alignment data to the default value,
and the X of stigma to the mid-point. If the alignment mode is
StigmaAlignY, sets the stigma Y alignment data to the default value,
and the Y of stigma to the mid-point.
• Close button: Stops alignment operation and closes the dialog window.
2.3.13 CD Measurement Dialog Window (option)
This window, which is used for measurement purposes, can be launched by clicking the
Measure
button in the Tool Button area on the Operation Panel or by selecting CD
Measurement from the Analysis menu.
Refer to the operation manual of CD Measurement option.
2.3.14 Login Setting Dialog Window
It opens by selecting Login Setting command from Option menu. This is available only when
logged in with the login name [S-3400].
You can create or change login names and their password for each user.
Fig. 2.3-47 Login Setup Window
Refer to <3.9.16 Setting Login Name>.