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3.5 Operation for Image Observation
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3) Click the Reset button. The following message indicating steps of operation will
be shown.
Fig. 3.5-60 Verifying the Operating Method
As described in the message, bring the point of interest to the image center at a
magnification of about 500×, then click Enter button of Tilt 0°.
4) The stage will be moved to a tilt angle of 20°. Bring the point of interest to the
image center and click Enter button of Tilt 20°.
5) The stage will be driven to a tilt angle of 40°. Again bring the point of interest to
the image center and click Enter button of Tilt 40°.
A Calibration Factor is now calibrated and indicated. This value represents the
deviation of specimen height from the reference position. Click Apply button, then
click Close button to close the box.
(c) Z-axis compensation
It measures the shift of the stage caused by changing Z-axis position.
For this auxiliary operation, use a flat specimen, and measure the specimen height as
accurately as possible with the height gauge and setting it.
Refer to < 3.2.4.2 Measuring and Setting the Specimen Height >.
1) Insert a specimen, set WD at 30 mm, tilt at 0° and R at 0°, then search for a
structure of interest near the specimen center.
2) Select Stage Calibration - Z Axis Comp command in the Option menu.
The following box appears:
Fig. 3.5-61 Z-axis Calibration Dialog Box