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6.3.2
6 - 15
Table 6.3-3 Event Command
Command Return Contents
HVOnChange 0 : HV-OFF
1 : HV-ON
HV changing
VaccChange 300-30000：0.3-30ｋ
V
Acceleration voltage changing
HVOnFinished Completion of HV setting
VaccFinished Completion of acceleration
voltage setting
MagChange 5-300000：x5-x300k Magnification changing
WDChange 400-7000：4.00-
70.00mm
W.D. changing
ObjLensChange Coarse：０-16383
Fine：0-4095
Focus value changing
ProbeCurrentChange 0-1000：0.0-100.0 Probe current changing
ABCFiniished Completion of ABCC
AFCFinished Completion of AFC
StagePositionChange Stage position changing
StagePositionFinished Completion of stage move
VacuumModeChange 0 : High vacuum
1 : Low vacuum
Vacuum mode changing
VacuumChange 6-270：6-270Pa Vacuum value changing
SemCommandFinished End of extension command