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3.5.2
3 - 39
3.5.2.1 Notes on Using the Lowest Magnification and Conducting Observations at a Low
Magnification
(1) Range of minimum magnifications
Table 3.5-2 shows available minimum magnifications for the various observation parameters.
The minimum magnification is subject to restrictions by WD and accelerating voltage, scan
speed.
Table 3.5-2 Minimum Magnification
TV/Fas
t
Slow
TV/Fas
t
Slow
TV/Fas
t
Slow
TV/Fas
t
Slow
TV/Fas
t
Slow
TV/Fas
t
Slow
TV/Fas
t
Slow
TV/Fas
t
Slow
30.0 ～ 28.1 80 55 45 32 37 25 27 19 20 14 15 11 13 9 12 9
28.0 ～ 26.1 80 55 45 32 35 25 27 19 19 13 15 11 12 9 12 8
26.0
～
24.1 80 55 42 30 35 25 25 18 18 13 14 10 12 9 11 8
24.0
～
22.1 75 50 42 30 32 23 25 17 18 13 14 10 12 8 11 8
22.0
～
20.1 65 47 42 30 30 21 23 17 17 12 13 10 11 8 10 7
20.0
～
18.1 65 47 40 27 30 21 23 16 16 11 13 9 11 8 10 7
18.0
～
16.1 65 45 35 25 30 20 21 15 15 11 12 9 10 7 10 7
16.0
～
14.1 60 42 35 25 27 19 20 14 14 10 11 8 10 7 9 6
14.0
～
12.1
604232232517191314101189696
12.0 ～ 10.1 55373020231617121391078686
10.0 ～ 8.1 4532271921151611118977575
8.0 ～ 6.1 4230231618131410107867575
6.0 ～ 4.1 35252014151112996756565
4.0
～
2.1 35252014151112996756565
2.0
～
0.3 35252014151112996756565
Vacc(kV)
3.5
～
9.5
～
29.5
～
13.5
～
19.5
～
55.5
～
WD(mm)
49.5
～
39.5
～