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4.1.1
4 - 1
4. MAINTENANCE
When attempting maintenance of this instrument, observe the following cautionary instructions.
(1) Read through the maintenance procedures contained in this manual, and then carry out
maintenance as described.
(2) Avoid disassembling/reassembling or repairing any part that is not described in the
maintenance procedures.
(3) The vacuum pump (turbo-molecular pump) recommends the maintenance of the oil
cartridge once/year and the bearing once/two years. The maintenance message is
displayed after one year from installed day and contact the Hitachi service of the nearest,
please.
4.1 Maintenance of Electron Optical Column
4.1.1 Filament Exchange
It is thought of as filament cuts when the image or the emission current doesn't obtain even if the
accelerating voltage is impressed. Directions on how to replace a filament, prepared in 3D CG,
are also available. For details, see 2.3.4 Menus.
(1) In the Setup tab in the Setup window, set the Filament value to 0.
Fig. 4.1-1 Filament Menu
(2) If the accelerating voltage is ON, click OFF to shut it off.
(Notes on display: When the accelerating voltage is ON, the OFF is active.
When the accelerating voltage is OFF, the ON is active.)