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6.4 CD Measurement Function (Option)
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Fig. 6.4-20 Manual Measurement Result
(d) In the CD measurement function of the SEM main unit, click the Run button again and
the system will return to image observation.
(e) By setting the measuring direction to Angle and clicking the Set button of CD
Measurement window, a measurement cursor that permits specifying the angle will
appear as in Fig. 6.4-21.
Fig. 6.4-21 Angle Measurement Cursor