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2.1 Control Knobs and Switches on Main Unit
2 - 4
2.1.3 Specimen Stage (Type I)
Figure 2.1-3 shows the Type I specimen stage.
Fig. 2.1-3 Specimen Stage (Type I)
• [X] control: Moves specimen in X direction within a range from 0 to 80 mm.
• [Y] control: Moves specimen in Y direction within a range from 0 to 40 mm.
• [Z] control: Moves specimen in Z direction or shifts WD (Working Distance) within a range
from 5 to 35 mm. (X-ray analysis position is at 15 mm working distance)
• [R] control: Rotates specimen through 360° (continuously variable)
• [T] control: Tilts specimen within a range from -20° to 90°.
• [Touch sensor and absorbed electron measurement terminal]: This terminal is used for the
measurement of the irradiation
current of electrons on the
specimen (normally it is used
as a touch sensor).
Touch Sensor : This observes whether the specimen or the stage come in contact
with components inside the specimen chamber
The sensor will inform with the buzzer and the message when
coming in contact.
Absorbed Current Terminal : The absorbed current can be measured by removing the cable for
the touch sensor, and connecting a minute ammeter instead.
[R] control
[Z] control
[Y] control
[T] control
Touch Sensor and
Absorbed Current
Terminal
[X] control