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3.9.7 Pseudo Color Display.............................................................................3 - 129
3.9.8 Data Entry Function ...............................................................................3 - 130
3.9.9 Raster Rotation, Dynamic Focus and Tilt Compensation .......................3 - 134
3.9.10 Printing Images Using Report Generation Function ...............................3 - 136
3.9.11 Copy Image............................................................................................3 - 143
3.9.12 Copy Image Information Text.................................................................3 - 143
3. 9.13 Oblique Image........................................................................................3 - 144
3.9.14 Optional Setting .....................................................................................3 - 145
3.9.15 Password Setting...................................................................................3 - 150
3.9.16 Setting Login Name ...............................................................................3 - 150
3.9.17 Restoring DB..........................................................................................3 - 152
3.9.18 User Dependent Operation Condition Memory.......................................3 - 153
3.9.19 Password Locking of Windows ..............................................................3 - 154
3.9.20 Downloading Stage Control Program.....................................................3 - 155
3.10 Image Quality ......................................................................................................3 - 157
3.10.1 Accelerating Voltage and Image Quality ................................................3 - 157
3.10.2 Probe Current Setting and Image Quality...............................................3 - 158
3.10.3 Objective Lens Aperture and Image Quality...........................................3 - 158
3.10.4 Influence of WD in Low-vacuum Mode...................................................3 - 159
3.11 Using SEM Data Manager ...................................................................................3 - 160
3.11.1 Precaution on SEM Data Manager.........................................................3 - 160
3.11.2 Functions ...............................................................................................3 - 161
3.11.2.1 Image Database.....................................................................3 - 161
3.11.2.2 Menu and Tool Buttons ..........................................................3 - 163
3.11.3 Operation...............................................................................................3 - 167
3.11.3.1 Registering Images on SEM Data Manager Database ...........3 - 167
3.11.3.2 Selecting User Name and Opening Data Tree .......................3 - 168
3.11.3.3 Image Display ........................................................................3 - 169
3.11.3.4 Image Information ..................................................................3 - 170
3.11.3.5 Viewer Display .......................................................................3 - 170
3.11.3.6 Data Entry..............................................................................3 - 171
3.11.3.7 Contrast Conversion...............................................................3 - 174
3.11.3.8 Image Processing ..................................................................3 - 177
3.11.3.9 Color Mixing ...........................................................................3 - 179
3.11.3.10 Printing Images......................................................................3 - 181
3.11.3.11 Image File Operation..............................................................3 - 181
3.11.3.12 Batch Operation of Image Files..............................................3 - 182
3.11.3.13 Slide Show .............................................................................3 - 184
3.11.3.14 Optional Setting......................................................................3 - 184
3.11.3.15 Optimizing and Repairing Database File ................................3 - 186
4 MAINTENANCE..............................................................................................................4 - 1
4.1 Maintenance of Electron Optical Column...............................................................4 - 1
4.1.1 Filament Exchange ..................................................................................4 - 1
4.1.2 Maintenance for the Objective Lens Movable Aperture ............................4 - 6